A method of fabricating an MRAM cell includes providing an isolation
transistor on a semiconductor substrate and forming an interconnect stack
on the substrate in communication with one terminal of the transistor. A
via is formed on the upper end of the stack so as to extend from a
position below the digit line to a position above the digit line. The via
also extends above the upper surface of a dielectric layer to provide an
alignment key. A MTJ memory cell is positioned on the upper surface in
contact with the via, and the ends of a free layer of magnetic material
are spaced from the ends of a pinned edge of magnetic material by using
sidewall spacers and selective etching.