Generally, the present invention provides a device for insertion into a body of a subject being treated to deliver localized x-ray radiation, and a method for fabricating such a device. The device includes a cathode structure that has a thin, diamond film as a cathode. The device further comprises a vacuum housing and an anode. A method for fabricating a device for localized x-ray radiation is described which includes the formation of a thin diamond film on a getter at temperatures below an activation temperature of the getter.