The present invention is directed to a filter module that may incorporate
sensors to measure various characteristics of fluid flow and filtration.
The sensors may be MEMS and may measure the temperature, flow rate,
pressure, etc. of the fluid. One or more MEMS sensors may be included in a
sensor package which, in turn, may be included in a sensor component. The
latter, which may also include a processor, conductor pins, etc. for data
communication, may be coupled to a sensor port in such a way as to allow
contact between the sensor(s) and the fluid. Sensor measurements may be
used to determine the occurrence of harmful events, such as cavitation or
particle breakthrough, or to predict the remaining service life of a
filter element.