An optical modulator that modulates light through the back side of a flip
chip packaged integrated circuit die. In one embodiment, an optical
modulator includes a p-n junction having a side wall that is substantially
vertical or perpendicular relative to a surface of the integrated circuit
die. A charged region is generated at the p-n junction and is modulated in
response to an electrical signal of the integrated circuit die. An optical
beam is directed through the back side, of the semiconductor substrate and
through the charged region along the side wall p-n junction. The optical
beam is deflected off a deflector back through the charged region along
the side wall back out the back side. In one embodiment, the side wall p-n
junction is provided with a metal oxide semiconductor (MOS) gate
structure. In another embodiment, the side wall p-n junction is provided
by an n- (or p-) well in a p- (or n-) epitaxy layer of the semiconductor
substrate. In one embodiment, the well is a well ring structure. In
another embodiment, there are a plurality of wells periodically located in
the epitaxy layer of the semiconductor substrate. In one embodiment, the
well or plurality of wells are surrounded with an optical beam confinement
structure.