A combination of a ceramic layer essentially consisting of magnesia ceramic
material and a metallic layer is proposed for a layered assembly for use
in applications such as electrostatic chucks which are subjected to
thermal stress. A combination of magnesia ceramic material and ferritic
stainless steel is preferred because of the similarities of the thermal
expansion coefficients of these materials. When a larger difference in the
thermal expansion coefficients exists between the selected combination of
materials, a damper layer having an intermediate thermal expansion
coefficient may be used so as to accommodate the difference in the thermal
expansion of the two layers.