The invention is directed to an extremely low-capacitance device for
shaping an electron beam. The device is based on a ceramic body having a
monolithic multi-layer structure. The manufacture of the ceramic body
ensues with the assistance of LTCC technology, whereby this method is
designationally modified. The body is constructed of pre-sintered ceramic
layers whose lateral shrinkage is suppressed. The through apertures of the
electrodes for the electron beam are thus arranged exactly coaxially, and
the tolerances of the electrode dimensions are decoupled from the
shrinkage during sintering. The electron beam of an electron gun is
focused and the intensity thereof is modulated with the assistance of such
a device.