A load port assembly capable of monitoring a plurality of performance
characteristics of wafer carriers. The load port assembly may include one
or more of the following monitoring systems: a torque measurement system,
a wafer height measurement system, a carrier identification reader, an
information pad, a resistivity measurement system, a cleanliness
measurement system, a seal performance detector, and a relative humidity
detector. In a preferred embodiment of the present invention, each of the
monitoring systems are integrated into either a carrier advance plate or a
port door of the load port assembly.