A high flow rate, transportable, ultra high purity gas vaporization and
supply system is provided which includes a vessel suitable for carrying
large quantities of a liquefied gas, valves to operate with liquid or gas
phases, a loading/unloading unit disposed on the vessel for loading and
unloading the liquefied gas to be supplied, and a heater containing
heating elements permanently positioned on the vessel to supply energy
into the liquefied gas. The heater causes the liquefied gas to be supplied
through the loading/unloading unit as a gas. A heater controller is also
provided which uses process variables feedback for regulating the heating
elements to maintain and regulate gas output.