A corona preionization electrode unit for use in gas laser apparatus,
wherein the electric field for corona discharge is concentrated, and
ultraviolet radiation is not blocked, and further the laser gas stream is
not obstructed, thereby allowing efficient, stable and uniform corona
preionization. The corona preionization electrode unit is disposed in a
gas laser apparatus together with a pair of main discharge electrodes for
ionizing and exciting a laser gas. The corona preionization electrode unit
includes a first electrode covered with a dielectric material and a second
electrode placed in contact with the outer surface of the dielectric
material around the first electrode. The corona preionization electrode
unit is positioned in the vicinity of either one of the main discharge
electrodes. The second electrode is a plate-shaped member having a
straight edge contacting at least the outer surface of the dielectric
material. A portion of the plate-shaped member other than the edge is
provided with a plurality of openings for passage of ultraviolet light for
preionization and a circulating laser gas.