There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.

_ lá est descrev método e instrumento cri multi-dimensional non-non-spatial histograma superfície e compar tal histograma mostr se superfície substancial conform um outro. _ este análise est particular aplicável comparing morr wafers determin se manufactured dispositivo conform um mestre ou se um morr est como outro. _