This invention relates to polishing pads and a method for making the
polishing pad surface readily machineable thereby facilitating permanent
alteration of the polishing pad surface to create an advantageous
micro-texture. The advantageous micro-texture is statistically uniform and
provides a polishing pad with improved break-in preconditioning time.
Polishing pads of this invention find application to the
polishing/planarization of substrates such as glass, dielectric/metal
composites and substrates containing copper, silicon, silicon dioxide,
platinum, and tungsten typically encountered in integrated circuit
fabrication.