Method of determining an illuminated surface

   
   

Method of determining a surface illuminated by incident light. First the intensity (I.sub.1 (x,y)) of light reflected from the surface is recorded in a first image of the surface. After this, the intensity (I.sub.2 (x,y)) of light reflected from the surface is recorded in a second image of the surface, taken at a different angle of illumination. Only the diffusely reflected light is recorded. The difference between the recorded intensities of the first and the second images is determined to obtain a representation that emphasizes variations in gradient of the surface. This representation is further processed by signal-adapted integration to a topographic description, that is, a height function of the surface.

 
Web www.patentalert.com

< Polarimetric scatterometry methods for critical dimension measurements of periodic structures

< Method and device for measuring thickness of liquid crystal layer

> Analytical method and apparatus

> Surface plasmon resonance sensor

~ 00118