The present invention relates to microfluidic systems, including valves and
pumps for microfluidic systems. The valves of the invention include check
valves such as diaphragm valves and flap valves. Other valves of the
invention include one-use valves. The pumps of the present invention
include a reservoir and at least two check valves. The reservoir may be of
variable volume. The present invention also relates to a flexible
microfluidic system. The present invention additionally relates to a
method of making microfluidic systems including those of the present
invention. The method includes forming a microfluidic system on a master,
connecting a support to the microfluidic system and removing the
microfluidic system from the master. The support may remain connected to
the microfluidic system or the microfluidic system may be transferred to
another substrate. The present invention further relates to a method of
manipulating a flow of a fluid in a microfluidic system. This method
includes initiating fluid flow in a first direction and inhibiting fluid
flow in a second direction and may be practiced with the valves of the
present invention.