A bi-stable micro-actuator is formed from a first and a second
silicon-on-insulator wafer fused together at an electrical contact layer.
A cover with a V-groove defines an optical axis. A collimated optical
signal source in the V-groove couples an optical signal to an optical port
in the V-groove. A mirror surface on a transfer member blocks or reflects
the optical signal. The transfer member has a point of support at the
first and second end. The mirror blocks or reflects the optical axis. An
expandable structure applies a compressive force between the first and
second point of support of the transfer member along a compressive axis to
hold the transfer member in a bowed first state or a bowed second state. A
control signal applied to a heating element in the expandable structure
reduces the compressive force, switching the transfer member to a second
state.
