A number of methods and systems for overcoming stiction are provided. The
systems include electro-mechanical systems capable of exerting a variety
of forces upon areas prone to stiction. The systems can be MEMS arrays or
other types of devices where stiction related forces occur. The methods
include a variety of ways of causing movement in areas prone to stiction
forces. Such movement can be vibrational in nature and is sufficient to
overcome stiction, allowing a trapped element to be moveed to a desired
location.