Micromirror devices, especially for use in digital projection are
disclosed. Other applications are contemplated as well. The devices employ
a superstructure that includes a mirror supported over a hinge set above a
substructure. Various improvements to the superstructure over known
micromirror devices are provided. The features described are applicable to
improve manufacturability, enable further miniaturization of the elements
and/or to increase relative light return. Devices can be produced
utilizing the various optional features described herein, possibly
offering cost savings, lower power consumption, and higher resolution.
