Ozonated water flow and concentration control apparatus

   
   

The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.

Вымысел отличает прибором и метод для поставлять ozonated вода до больше чем один отростчатый инструмент. Вода Ozonated первой концентрации полученной от ozonated генератор воды и вода полученная от источника смешана для того чтобы произвести ozonated вода второй концентрации. Ozonated вода второй концентрации поставляет к первому инструменту процесса. Вода Ozonated от ozonated генератор воды поставлена к второму инструменту процесса пока поставлять ozonated вода второй концентрации к первого инструмента процесса.

 
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