Electromagnetic disturbance analysis method and apparatus and semiconductor device manufacturing method using the method

   
   

An electromagnetic disturbance analysis method for analyzing an external noise to a semiconductor integrated circuit includes an impedance extraction step of extracting impedance information on the power wiring in the target semiconductor integrated circuit or the power wiring in the semiconductor integrated circuit and the external power wiring of the semiconductor integrated circuit, an equivalent circuit creating step of creating an equivalent circuit from the impedance information, and an analysis step of supplying a noise waveform externally and analyzing the influence of the noise on the semiconductor integrated circuit.

 
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