A microactuator is disclosed including one or more stationary plates formed
on a substrate, a mirror base plate on which a mirror is formed, and one
or more actuation plates coupled to the mirror base plate by one or more
microspring mechanisms. The mirror base plate, the one or more actuation
plates and the one or more microspring mechanisms are suspended over the
stationary plates by one or more anchors. The stationary plates and the
actuation plates are formed of a doped material so as to be electrically
conductive. Upon application of a voltage potential between the respective
plates, the actuation plates are pulled down toward the stationary plates,
thus exerting a drive force on the base mirror plate to actuate the mirror
between switching positions.
