A high precision force and displacement measuring device adapted to operate
in at least two directions, including signal multiplexing scheme providing
multiple signal channels to be transmitted through a single pickup
electrode and sense amplifier, while maintaining high isolation between
the channels, as well as identical electrical response characteristics of
all channels. The device may be used in conjunction with a movable stage
(such as on an optical microscope) to perform mechanical measurements on
Micro Electro-Mechanical Systems (MEMS) devices.
