Sensitivity enhancement of semiconductor magnetic sensor

   
   

A semiconductor magnetic sensor includes a semiconductor substrate, a source, a drain, a gate, and a carrier condensing means. The source and the drain are located in a surface of the substrate. One of the source and the drain includes adjoining two regions. The gate is located between the source and the drain for drawing minority carriers of the substrate to induce a channel, through which the carriers flow between the source and the drain to form a channel carrier current. The carriers flow into the two regions to form two regional carrier currents. The magnitude of a magnetic field where the sensor is placed is measured using the difference in quantity between the two regional carrier currents. The carrier condensing means locally increases carrier density in the channel carrier current in the proximity of an axis that passes between the two regions in order to increase the difference.

Un sensor magnético del semiconductor incluye un substrato del semiconductor, una fuente, un dren, una puerta, y medios que condensan de un portador. La fuente y el dren están situados en una superficie del substrato. Uno de la fuente y del dren incluye colindar dos regiones. La puerta se localiza entre la fuente y el dren para los portadores de dibujo de la minoría del substrato para inducir un canal, a través de el cual los portadores fluyen entre la fuente y el dren a la forma una corriente del portador del canal. Los portadores fluyen en las dos regiones a las corrientes regionales del portador de la forma dos. La magnitud de un campo magnético donde se coloca el sensor se mide usando la diferencia en cantidad entre las dos corrientes regionales del portador. Los medios que condensan del portador localmente aumentan densidad del portador en la corriente del portador del canal en la proximidad de un eje que pase entre las dos regiones para aumentar la diferencia.

 
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