Projection optical system, exposure system provided with the projection optical system, and exposure method using the projection optical system

   
   

A projection optical system includes a plurality of light-transmissive members and projects an image of a first surface onto a second surface. The projection optical system includes a light-transmissive crystal member made of crystal material. At least one of the light-transmissive crystal members satisfies 0.3

 
Web www.patentalert.com

< Position control apparatus for motor

< Wide angle paraconic reflector antenna

> Lens system installed in mobile communication terminal

> Raman amplification method and optical signal transmission method using the same

~ 00156