A Microelectromechanical (MEMS) device that can minimize the effects of
fabrication tolerances on the operation of the device can include a MEMS
electromagnetic actuator to selectively generate displacement forces to
displace an actuable element along a path. A cantilever can apply an
opposing force to the actuable element to control the amount of
displacement. Coil ends of the actuator can be shaped to vary a gap
distance between the coil ends, and/or the magnetic portion of the
actuable element may be shaped, so as to vary the force applied to the
actuable element along the displacement axis. One or more pins located in
the deflection path of the cantilever can contact the cantilever at one or
more points so as to change the bending resistance of the cantilever. The
cross-section of the cantilever can also be varied along its length so as
to change the bending resistance of the cantilever.
