A method for making an integrated electrolytic capacitor wherein a
substrate (40) is coated with at least one sequence of each of the
following layers: a vacuum deposited film (42) having a high specific
surface area, which is selected from the group consisting of valve metals
and mixtures of valve metals with valve metal oxides; superimposed on the
film having a high specific surface area, at least one dielectric film
(46) comprising a substance selected from the group consisting of valve
metal oxides, their complex oxides with at least one rare earth metal and
their complex oxides with at least one alkaline earth metal; and a solid
electrolyte film (48) superimposed on the at least one film.
