A method of and apparatus for determining a defect-free semiconductor integrated
circuit, such as a CMOS IC. The method includes a measurement step of selecting
a defect-free CMOS integrated circuit (IC) from a group of CMOS integrated circuits
by measuring quiescent power supply current (QPSC), a step of successively inspecting
a test IC and the reference defect-free IC for resemblance for QPSCs, and a comparison
and determination step of determining resemblance between QPSC data so that when
the resemblance is high, the first and second ICs are determined to be defect-free
ICs, and when the resemblance is low, the first and second ICs are determined to
be defective ICs. The apparatus performs at least those steps.
