The present invention includes methods and devices that improve the radiation-resistance
of a movable micromechanical optical element. In particular, a radiation-resistant
layer is added to a movable micro-mechanical optical element, suitable to reduce
the surface and bulk material changes to the element that result from exposure
to pulsed laser energy densities less than 100 micro-joules per square centimeter
and at wavelengths less than or equal to about 248 nm.
