Stage apparatus and exposure apparatus

   
   

A stage apparatus comprising includes a stage that is movable in a direction, a multiphase actuator for generating a driving force when the stage is accelerated and decelerated in the direction, and a single-phase actuator for generating a driving force in the direction when the stage moves at a constant speed.

 
Web www.patentalert.com

< Method and system of ordering visual prints from digital image data

< Driving apparatus, exposure apparatus, and device manufacturing method

> Information processing apparatus and method

> Image processing apparatus, image processing method, and storage medium

~ 00180