A substrate-handling robot which serves a processing tool such as a
plating tool may be automatically controlled by a controller to perform a
self-calibration procedure. As part of the procedure, an end effector of
the robot is moved to interact with sensors provided on a calibration
fixture that is positioned in a substrate placement location for which
the calibration procedure is performed. The calibration fixture may have
an opening formed therein to allow movement of the robot end effector
within the calibration fixture. Sensor light beams generated by the
sensors may interact with the end effector during the automatic
calibration process so as to determine calibration data for the substrate
placement location.
