A robot for carrying a substrate in which minimum turning radius is small when
the arm is retracted although a plurality of forks are provided and installation
area can be minimized. The robot comprises a fixed base, a first turnable arm linked
with the fixed base, a second turnable arm linked with the first arm, and a turnable
fork linked with the second arm, wherein the fork comprises a plurality of first
and second independent forks. The first and second forks are fixed coaxially and
vertically in two stages to the forward end part of the second arm such that they
can turn independently and first and second fork drive motors are disposed in the
second arm.
