A vertical color filter sensor group, formed on a substrate (preferably a semiconductor
substrate) by a semiconductor integrated circuit fabrication process, and including
at least two vertically stacked, photosensitive sensors. Other aspects of the invention
are arrays of such vertical color filter sensor groups, and methods for fabricating
such vertical color filter sensor groups and arrays thereof. In some embodiments,
the sensor group is a block of solid material having a readout surface. At least
two vertically stacked sensors are formed in the block and a trench contact is
provided between one of the sensors and the readout surface.
