An integrated fluid delivery system (IFDS) is provided for delivering fluid streams
such as high purity fluid streams to a processing destination, such as a wafer
processing chamber. The delivery system includes a first modular manifold for internally
channeling the high purity fluid streams along seamless slots. The first modular
manifold receives each of the high purity fluid streams at a corresponding porting
aperture. At least one fluid device from a group consisting of a flow controller,
a valve, a filter and a pressure transducer is provided. The at least one fluid
device is in fluidic communication with a corresponding one of the high purity
liquid streams of the first modular manifold to dispense the high purity fluid
streams from the integrated liquid delivery system to the wafer processing chamber.
