An analysis apparatus has a measurement head for measuring characteristics of
a sample, a calibration conditions file comprising at least one calibration condition
obtained by carrying out device calibration for the measurement head in advance,
and a measurement head controller for designating one of the calibration conditions
within the calibration conditions file. Measurement sequence data comprised of
a sequence of measurement steps has measurement conditions for carrying out measurements
by the measurement head and the calibration conditions designated by the measurement
head controller. A measurement device refers to each measurement step of the measurement
sequence data and carries out measurement after inputting the measurement conditions
and the calibration conditions for each measurement step to the measurement head.