The present invention provides an optical microbench having intersecting structures
etched into a substrate. In particular, microbenches in accordance with the present
invention include structures having a planar surfaces formed along selected crystallographic
planes of a single crystal substrate. Two of the structures provided are an etch-stop
pit and an anisotropically etched feature disposed adjacent the etch-stop pit.
At the point of intersection between the etch-stop pit and the anisotropically
etched feature the orientation of the crystallographic planes is maintained. The
present invention also provides a method for micromachining a substrate to form
an optical microbench. The method comprises the steps of forming an etch-stop pit
and forming an anisotropically etched feature adjacent the etch-stop pit. The method
may also comprise coating the surfaces of the etch-stop pit with an etch-stop layer.
