A fluid ejector includes a fluid channel having a resistive heater and terminating
in a nozzle, a common bus formed transverse to the fluid channel and between the
resistive heater and the nozzle, a connection line laterally adjacent to the fluid
channel, and a connection structure for electrically connecting the common bus
with the resistive heater and the connection line, the connection structure including
a first set of one or more layers for electrical connection and a second set of
one or more layers for covering the common bus and connection line. The first set
of one or more layers includes a doped polysilicon layer on or overlaid by an optional
tantalum-silicide layer. The second set of one or more layers includes a nitride
layer on or overlaid by a tantalum layer.
