Inspection of surfaces

   
   

A device for the inspection of surfaces, notably for the inspection of a surface of a semiconductor (14), which device comprises at least one laser light source (1) and a detector for detecting the light (13) that is reflected from the surface (10) to be inspected; the device also includes at least one mode filter (15; 15.1) for filtering the reflected light.

 
Web www.patentalert.com

< Lithographic apparatus and device manufacturing method

< Head positioning device and disk drive using same

> Interfacing method for network printers

> Servo defect management scheme in hard disk drives

~ 00188