An electronic system for selectively detecting and identifying a plurality of
chemical species, which comprises an array of nanostructure sensing devices, is
disclosed. Within the array, there are at least two different selectivities for
sensing among the nanostructure sensing devices. Methods for fabricating the electronic
system are also disclosed. The methods involve modifiying nanostructures within
the devices to have different selectivity for sensing chemical species. Modification
can involve chemical, electrochemical, and self-limiting point defect reactions.
Reactants for these reactions can be supplied using a bath method or a chemical
jet method. Methods for using the arrays of nanostructure sensing devices to detect
and identify a plurality of chemical species are also provided. The methods involve
comparing signals from nanostructure sensing devices that have not been exposed
to the chemical species of interest with signals from nanostructure sensing devices
that have been exposed to the chemical species of interest. Nanostructure sensing
device array structures that can measure and subtract out environmental factors
are also disclosed.
