A new method to manufacture a product is achieved. The method comprises providing
a control system and a process tool. The process tool comprises multiple chambers.
The process tool stores a plurality of recipes. The control system comprises a
database. A set of chambers and a recipe name are selected based on the database.
A recipe body is uploaded from the process tool to the control system based on
the recipe name. The recipe body is modified to generate a runtime recipe body
that specifies the set of chambers. The runtime recipe body is downloaded from
the control system to the process tool. A product is processed in the process tool
using the runtime recipe body.
