Semiconductor products, especially semiconductor wafers, are processed
according to a defined sequence of orders with the products arranged in a container.
Product processing data of product processing steps are stored with reference to
product position data identifying product positions in the product containers.
When the position of products in a container is required, a product handling order
is defined and integrated in the predefined sequence of orders thereby resulting
in an extended sequence of orders. The product processing steps and the product
handling step are executed in compliance with the extended sequence of orders and
product position change data are stored. All slot-related semiconductor processing
information are thereby automatically brought in conformity with the actual material
flow in cases where handling steps are executed that change the semiconductor positions
upon irregular processing execution.
