A chuck body mounts a substrate within a vacuum chamber. Contiguous portions
of
the substrate and the chuck body form a heat-transfer interface. An intermediate
sealing structure seals the chuck body to the substrate independently of any contact
between the chuck body and the substrate and forms a separately pressurizable region
within the vacuum chamber. A control system promotes flows of fluid through a periphery
of the heat-transfer interface within the separately pressurizable region for controlling
fluid pressures and related transfers of heat at the heat-transfer interface according
to an overall aim of regulating the substrate temperature.
