A method and apparatus for formulating and controlling concentrations of deactivating
chemicals in a solution inside a chamber. The solution may include chemical components
that are deactivating chemicals, as well as chemical components that are base chemicals,
acting as a diluent for a deactivating chemical, or as a vehicle or carrier for
a deactivating chemical. A capacitor is exposed to the solution, wherein the solution
comprises a dielectric material between the plates of the capacitor. Permittivity
of the dielectric is affected by the relative concentrations of the chemical components,
and thus a measurement of the electrical properties of the capacitor can be used
to determine the concentration levels of multiple chemical components in the solution.
