Disclosed are a film bulk acoustic resonator, a duplexer filter having
the same, and a semiconductor package thereof. The film bulk acoustic resonator
comprising: a semiconductor substrate; a lower electrode more than two layers formed
at an upper surface of the semiconductor substrate; a piezoelectric layer deposited
on an upper surface of the lower electrode with a certain thickness; and an upper
electrode more than two layers formed at an upper surface of the piezoelectric
layer, has an excellent bonding characteristic. The duplexer filter can microminiaturize
a size thereof by integrating a film bulk acoustic filter formed by connecting
the plurality of film bulk acoustic resonators serially and in parallel and peripheral
passive elements of the film bulk acoustic filter into one semiconductor chip.
Also, the semiconductor package is suitable for the duplexer filter.
