Variable optical attenuator with MEMS devices

   
   

A variable optical attenuator includes a first lens, a MEMS device, a second lens, and a wedge. The first lens is configured to collimate an input light received on a first port and focus an output light on a focus point proximate to a second port. The MEMS device includes a reflection surface having a tilting angle thereof controllable by a control variable. The second lens has a focus point positioned proximate to the reflection surface of the MEMS device. The wedge is positioned between the first lens and the second lens and is configured to refract the input light received from the first lens to enter the second lens and refract the output light received from the second lens to enter the first lens.

 
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