The present invention provides an optical illumination device that permits an
increase in the fill of a multiplicity of light sources that constitute a secondary
source formed on an illuminated pupil plane. A fly's eye lens that forms a multiplicity
of light sources from a light beam emitted by an optical integrator is disposed
in the optical path between the optical integrator and an irradiation surface.
The fly's eye lens comprises, in order from the light-source side, a first fly's
eye member and a second fly's eye member. A cylindrical lens group arranged in
a first direction is formed on each of the light source-side surface of a first
fly's eye member and the light source-side surface of a second fly's eye member,
and a cylindrical lens is group arranged in a second direction orthogonal to the
first direction is formed on each of the irradiation surface side surface of the
first fly's eye member and the irradiation surface side surface of the second fly's
eye member.
