A lithography process for creating patterns in an activating light curable liquid
using electric fields followed by curing of the activating light curable liquid
is described. The process involves the use of a template that is formed of non-conductive
and electrically conductive portions. The template is brought into close proximity
to the activating light curable liquid on the substrate. An external electric field
is applied to the template-substrate interface while maintaining a uniform, carefully
controlled gap between the template and substrate. This causes the activating light
curable liquid to be attracted to the raised portions of the template. Activating
light is applied to the curable liquid while an electric field is applied to the
template to create a patterned layer on the substrate.
