An electrochemical processing chamber which can be modified for treating different
workpieces and methods for so modifying electrochemical processing chambers. In
one particular embodiment, an electrochemical processing chamber 200 includes
a plurality of walls 510 defining a plurality of electrode compartments
520, each electrode compartment having at least one electrode 600 therein,
and a virtual electrode unit 530 defining a plurality of flow conduits,
with at least one of the flow conduits being in fluid communication with each of
the electrode compartments. This first virtual electrode unit 530 may be
exchanged for a second virtual electrode unit 540, without modification
of any of the electrodes 600, to adapt the processing chamber 200 for
treating a different workpiece.
