The invention relates to a holding device for wafers in an arrangement for wafer
inspection, comprising two grippers (11, 12), each of which, in the closed
state of the holding device (8), encloses a subsection of the wafer circumference
and which are connected to a drive device (27) and, when the latter is driven,
the grippers (11, 12) move away from each other for the purpose of opening
the holding device (9) and move toward each other for the purpose of closing
the holding device (8), and a holding arm (13), on which the two
grippers (11, 12) are pivotably mounted.
In this case the holding arm (13) is mounted such that it can rotate about
an axis (A) which lies substantially in the plane covered by the wafer (W), so
that after a rotation through 180 about the axis (A), a wafer (W) held between
the grippers (11, 12) has been turned.
