A drive control circuit executes a cycle at least once while a first movable
part
moves one pitch of an electrode of a plurality of groups of electrodes, the cycle
including a first operation for attracting the first movable part to a driving
electrode substrate, a second operation for attracting the first movable part and
a second movable part to stripe electrodes, a third operation for attracting the
second movable part to the driving electrode substrate, and a fourth operation
for attracting the first and second movable parts to the stripe electrodes.
