A particle beam deposition apparatus includes a particle source for generating
a plurality of particles in suspended form, an expansion chamber, and a deposition
chamber connected to the expansion chamber by an aerodynamic focusing stage, and
containing a substrate. The aerodynamic focusing stage may be comprised of a plurality
of aerodynamic focusing elements, or lenses. Particles, including nanoparticles,
may be deposited on the substrate by generating an aerosol cloud of particles,
accelerating the particles into the expansion chamber, creating a collimated beam
out of the particles by passing them through the aerodynamic focusing lenses and
into a deposition chamber, and impacting the particles into the substrate.
