A highly reliable capacitor, a semiconductor device having high operating performance
and reliability, and a manufacturing method thereof are provided. A capacitor formed
of a first conductive film 102, a dielectric 103 made of an insulating
material, and a second conductive film 104 is characterized in that a pin
hole 106 formed by chance in the dielectric 103 is filled up with
an insulating material (filler) 107 made of a resin material. This can prevent
short circuit between the first conductive film 102 and the second conductive
film 104. The capacitor is used as a storage capacitor provided in a pixel
of a semiconductor device.
