An apparatus for supercritical processing and non-supercritical processing of
a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical
processing module, and a robot. The transfer module includes an entrance. The supercritical
processing module and the non-supercritical processing module are coupled to the
transfer module. The robot is preferably located within the transfer module. In
operation, the robot transfers a workpiece from the entrance of the transfer module
to the supercritical processing module. After supercritical processing, the robot
then transfers workpiece from the supercritical processing module to the non-supercritical
processing module. After the non-supercritical processing, the robot returns the
workpiece to the entrance of the transfer module. Alternatively, the non-supercritical
processing is performed before the supercritical processing.
